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Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism

Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism
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Author(s): Bijan Shirinzadeh (Monash University, Australia), Umesh Bhagat (Monash University, Australia)and Yanling Tian (Tianjian University, China)
Copyright: 2011
Volume: 1
Issue: 3
Pages: 15
Source title: International Journal of Intelligent Mechatronics and Robotics (IJIMR)
Editor(s)-in-Chief: Zuobin Wang (Changchun University of Science and Technology, China)
DOI: 10.4018/ijimr.2011070103

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Abstract

This paper presents an experimental study of laser interferometry-based closed-loop motion tracking for flexure-based four-bar micro/nano manipulator. To enhance the accuracy of micro/nano manipulation, laser interferometry-based motion tracking control is established with experimental facility. The authors present and discuss open-loop control, model-based closed-loop control, and robust motion tracking closed-loop control for flexure-based mechanism. A comparative error analysis for closed-loop control with capacitive position sensor and laser interferometry feedback is discussed and presented. Model-based closed-loop control shows improvement in position and motion tracking over open-loop control. Robust control demonstrates high precise and accurate motion tracking of flexure-based mechanism compared to the model-based control. With this experimental study, this paper offers evidence that the laser interferometry-based closed-loop control can minimize positioning and tracking errors during dynamic motion, hence realizing high precision motion tracking and accurate position control.

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